Using intense magnetic fields and substantial electron currents, Veeco’s low maintenance, gridless ion sources produce a very high current density at lower energies than is practical with gridded sources. Gridless sources are available in several sizes and can be configured with or without filaments, depending upon the process requirements.
The product range includes:
- Mark I gridless
- Mark II gridless
- Mark II High Output gridless
- Mark II+ gridless
- Mark II+ High Output gridless
More details can be found on the Veeco Ion Beam components web site