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DC Gridded Ion Sources

Veeco’s DC ion sources come in either circular or linear geometries and are easy to install, clean and maintain. These ion sources produce, broad, uniform, monoenergetic ion beams that are used in a variety of research and production applications, most of which involve surface modification, such as etching and deposition. DC sources are ideal for operation in inert environments or very short duration operation in oxidizing environments.

The product range includes:

  • 3 cm DC
  • 5 cm DC
  • 8 cm DC
  • 11 cm DC
  • 12 cm DC
  • 15 cm DC
  • 21 cm DC
  • 6 x 30 cm DC

For more information please visit Veecos Ion Beam Website!