Automatic Resistivity Measurement Systems
Creative Design Engineering (CDE) offers a complete product range of production-worthy, high performance, cost-effective four point probe ResMap resistivity mapping tools from semi-automatic 200 mm to fully automatic 300 mm FOUP systems. The ResMap products are used for R&D as well as for large volume production. The applications include implanted and deposited layers including copper. Systems specifically tailored for the photovoltaic industry and for thin film head processes are also available. The latest addition is the ResMap 575 for wafers 450 mm in diameter. The simple and rugged design makes the ResMap 575 the ideal tool for early 450 mm adopters.