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Ion Beam Sources

For many years, Veeco Instruments been the worldwide leader for ion beam technology. With the acquisition of Iontech and Commonwealth Scientific Corporation (CSC) and the integration of their products, a new product group "Ion Beam Components" has been formed. As a result of that, we are now able to offer you solutions for virtually any ion beam application. Virtually any ion beam application can be covered:

Ion assisted deposition

Surface preclean

Ion beam etching

Ion beam sputtering

Surface texturing

Reactive ion beam etching (RIBE)

Chemically assisted ion beam etching (CAIBE)