RF Gridded Ion Sources

Veeco’s filamentless RF ion sources are low maintenance and ideal for processes using 100% argon, oxygen or other reactive gases. They come in either circular or linear geometries. RF sources produce broad, uniform, monoenergetic ion beams in both inert and oxidizing environments. An optional 4-grid design offers very high collimation. In addition, these sources have very long maintenance intervals, making them ideal for both batch and load-locked production processes.

The product range includes:

3 cm RF

6 cm RF

12 cm RF

16 cm RF

16 cm High Power RF

6 x 22 cm RF

6 x 66 cm RF

6 x 110 cm RF

More details could be found at Veeco ion beam components' web site