Gridless End-Hall Ion Sources

Using intense magnetic fields and substantial electron currents, Veeco’s low maintenance, gridless ion sources produce a very high current density at lower energies than is practical with gridded sources. Gridless sources are available in several sizes and can be configured with or without filaments, depending upon the process requirements.

The product range includes:

Mark I gridless

Mark II gridless

Mark II High Output gridless

Mark II+ gridless

Mark II+ High Output gridless

More details could be found at Veeco ion beam components' web site