Gridless Anode Layer Ion Sources

Veeco’s high power anode layer ion sources are scalable in either circular or linear geometries in excess of three meters and feature high current density operation from high vacuum up to milliTorr pressure ranges. The sources provide both gridless and filamentless operation with all inert and reactive gases. The sources' low maintenance, independent beam energy and current control make them excellent for processes requiring long, uninterrupted production runs. Round and linear anode layer sources are ideal for a wide variety of applications, such as architectural/ automotive glass, flat panel displays, web coating, ophthalmic, precision optics, data storage and semiconductor.

The product range includes:

ALS 340

ALS 1000

ALS 1500

More details could be found at Veeco ion beam components' web site