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Tape Remover |
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The Wafer Tape Remover Model (DXR, STP series) is designed for the latest technology of back-grinding processes. The Tape Removal System uses a 180° peeling method to achieve a minimum stress on the ground wafer. Fiber optic sensor system prevents the removal of tape from broken wafers. |
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Peeling of ultra-thin wafers |
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Minimum tape consumption |
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Optional high-power UV lamp |
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Wafer size 100 to 200 mm |
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Compact Footprint with excellent space factor |
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Minimized risk for Electrostatic Discharge (ESD) by ionized airflow |
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Metal porous chuck |
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More details could be found at Teikoku Taping's web site |
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