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PSI Standards are the NIST traceable calibration standards made by Process Specialities. Oxide and Nitride thin film standards, dual step height standards and dual thickness metal standards are available. In addition to the calibrated area, useful diagnostic features are part of the design of each standard. The diagnostic features allow the user to check important parameters of the instrument which contribute to signal quality and measurement results. PSI is ANSI/NCSL Z540-1 compliant and has received ISO/IEC 17025 accreditation from NVLAP/NIST.