Dual Thickness Metal Standards

Process Specialties’ new metal standards are the only NIST traceable metal thickness standards in the industry. The standards are available for Aluminium, Copper, Tantalum and Titanium. They allow the calibration and monitoring of widely used metal metrology tools on the most frequently used materials. Each dual thickness metal standard has two NIST traceable, calibrated thickness steps located on it. This makes it easy to determine the linearity of metrology tools over a specific thickness range without the need to load and set-up a second standard. Special features on the metal standards allow the user to determine the tool’s useable spot size, verify actual beam position versus the electronic spot, plus monitor height and repeatability of stage movement. All of these parameters contribute to signal quality and measurement results and should be checked on a regular basis.

Key Features:

New Dual Metal Thickness Technology

Aluminium, Copper, Tantalum, Titanium

Diagnostic features for spot size, spot offset, and stage positioning

Superior film quality and uniformitys

Pattern recognition alignment marks

NIST traceable

More details could be found at PSI Standards' web site