Dual Step Height Standards for Profilometers and AFMs

The dual step height standards are offered over a wide range of nominal thicknesses. The precision SiO2 design is suitable for all stylus based mechanical profilometers and AFM tools. Each dual step height standard has two NIST traceable, calibrated thickness steps located on it. This makes it easy to determine the linearity of metrology tools over a specific height range without the need to load and set-up a second standard. Special features on the step height standard allow stylus integrity, alignment and magnification to be examined. All of these parameters contribute to signal quality and measurement results and should be checked on a regular basis.

Key Features:

New Dual Step Height technology

Suitable for profilometers and AFM tools

Diagnostic features for stylus integrity, alignment, and magnification

Superior film quality and uniformitys

Pattern recognition alignment marks

NIST traceable

More details could be found at PSI Standards' web site