Equipment for non-destructive, high sensitivity and high resolution current imaging for failure analysis

The Magma tool series has unique capability for isolating failures in complex devices, advanced packages, and full assemblies without de-capsulation or de-processing.

The equipment is available in two configurations, either as C20 with a superconducting quantum interference device (SQUID) sensor, or as C30 with both SQUID and giant magnetoresistance (GMR) sensors build into the measurement head. While the SQUID sensor provides extremely high current sensitivity, to below 500 nA, and a lateral resolution down to 3 µm, the GMR sensor is less current sensitive but delivers excellent lateral resolution to below 300 nm.

Magma is not affected by IC materials, since it uses magnetic fields to image current paths. This enables the Magma to see through packaging and interconnect layers and to pinpoint 'buried' defects at extremely low currents as well as resolve resistive open failures. These include; low resistance shorts, metal line cracks, plate through hole cracks, C4 bump failures, via delaminations, and wire bond failures that are a major concern for most semiconductor manufactures. Image subtraction capabilities allow to compare images between known good devices and the device under test, significantly shortening the analysis process.

Interactive User Interface

Intuitive and easy to use

Automated X, Y, and Z staging for quick setups and changes

Immediate test results

Data Analysis Tools

Peak Localization for increased defect resolution

Current Vectoring

3D plotting

Image Overlay - Magma, CAD, XRAY

Image Subtraction

Knights Interface

High resolution Optical / IR Camera

Resolves defects at extremely low current levels (500nA)

Resistive open defects

Functional failures

Robust

Automated window

Auto z-stage with touch probe for auto sample setup

Automated system control

Improved user interface

Electrical Interface

Single die wafer level probing

Tester Interface

Mobile and Versatile

All units on wheels

No special facilities

Room-temperature scan

More details could be found at Neocera's web site