Robot & End Effector Upgrade Kits for Process Equipment

Fabworx Solutions offers complete assembly upgrades designed for precision and structural integrity to dramatically improve reliability, contamination, repeatability and throughput of existing semiconductor manufacturing equipment.

All Fabworx products are developed using root-cause analysis to identify chronic problems exhibited in presently used OEM equipment.

Customer-critical issues are carefully evaluated in core performance areas, with a strong emphasis on proactive design. This results in exceptionally robust, more reliable tools that translate customer needs into customer solutions.

The Fabworx Solutions Fabhp and Fabhp-v robot upgrades for Endura® and Centura® platforms are designed for precision and structural integrity to dramatically improve reliability, contamination, repeatability/accuracy and throughput. The result is higher yield, greater productivity and a rapid return on investment.

End Effectors

Blade thickness (0.090 in.) offers maximum wafer stability, and provides additional (0.030 in.) clearance for pick motion.

Three replaceable perfluoroelastomer wafer support pads provide exceptional coefficient of static friction, eliminating wafer movement during robot motion.

More details could be found at Fabworx Solutions' web site