Non-Contact Surface Profiling System MP2100

The MP2100 is a high resolution measurement tool for surface roughness and waviness. It can be used as both a production tool for inline quality inspection, as well as a research and development tool for establishing standards and researching tolerances. The MP2100 utilizes the same non-contact optical measurement technology as other Chapman profilers.

The MP2100 offers the following key features:

0.01 nm height resolution

50 nm sampling

0.50 µm lateral resolution

Scan lengths ranging from µm to complete circumferences (200 mm or 300 mm wafer)

Roughness and waviness data from a single scan

More details could be found at Chapman Instruments' web site