Automatic Resistivity Measurement Systems

Creative Design Engineering (CDE) offers a complete product range of production-worthy, high performance, cost-effective four point probe ResMap resistivity mapping tools from semi-automatic 200 mm to fully automatic 300 mm FOUP systems. The ResMap products are used for R&D as well as for large volume production. The applications include implanted and deposited layers including copper. Systems specifically tailored for the photovoltaic industry and for thin film head processes are also available. The latest addition is the ResMap 575 for wafers 450 mm in diameter. The simple and rugged design makes the ResMap 575 the ideal tool for early 450 mm adopters.

The products are used in the following industries

Semiconductor

Flat Panel Display (FPD)

Hard drives and heads

Micromechanics

Photovoltaic

Using the same system it monitors your critical processes in:

CVD

PVD (Sputtering)

ECD (Electro Chemical Deposition - Cu)

Implant

Diffusion

Epitaxy

More details could be found at CDE's web site